NSR-S610C Selected as Editors' Choice Best Products Winner

At SEMICON West 2009, the Nikon NSR-S610C ArF immersion scanner was selected as an Editors' Choice Best Products Winner for 2009 by Semiconductor International (SI) magazine. Now in its 21st year, the prestigious annual SI Editors’ Awards Program honors products, materials, or services that are proven in the semiconductor manufacturing environment and are designed to become processes of record and serve the industry for years to come.

To be a candidate for the 2009 Best Product Awards Program, products must have been proven in a semiconductor or related manufacturing operation before January 2009. The Semiconductor International editors then judged the products based on technical advantages compared to competing products, and contributions to advancement of state of the art manufacturing, etc. Additionally, confidential comments obtained from actual product users were included in rating the candidates and selecting the winning products.

The editors of Semiconductor International honored the Nikon NSR-S610C immersion scanner and the other 2009 award recipients at a ceremonial breakfast at the Westin's Metropolitan Room during SEMICON West. In his acceptance speech, Hamid Zarringhalam, Executive Vice-President of Nikon Precision Inc. and President of Nikon Precision Europe commented “The NSR-S610C is the industry’s first 1.30 NA scanner for 45 nm mass production and development of 32 nm devices. Nikon Corporation is honored to receive this award for our contribution to the continued development of next generation lithography systems.”

Hamid Zarringhalam, far left, accepted the Editor’s Choice award on behalf of Nikon Corporation. (Photo courtesy of Semiconductor International magazine.)