Eliminating the Risk of Used Equipment

IC manufacturers know that the majority of their process layers do not require the most leading-edge lithography systems, and purchasing used equipment can be a cost-effective solution for meeting less critical capacity requirements. However, fab purchasing agents are well aware that acquiring used steppers and scanners can be a complicated process that often involves a tradeoff between cost and risk.

Buying lithography equipment from a third party introduces uncertainty about how the system was de-installed and shipped, what the storage conditions were, how the stepper was maintained during the storage/shutdown period, as well as the risks associated with installation by non-OEM (original equipment manufacturer) service providers. These variables expose your fab to potential performance issues, delays in critical ramp-ups, and cost overruns.

As a solution to manage these risks, Nikon offers a variety of flexible programs for fabs to acquire and install lower-priced used Nikon lithography equipment with minimized risk. Comprehensive Nikon used equipment solutions provide alternatives to buying new tools with a higher sticker price, or purchasing a used tool “as is” from a broker.

Programs	Offerings
Nikon Certified Used Equipment	Refurbished with genuine Nikon parts Installed and tuned by Nikon engineers Guaranteed to meet original performance specs Operator and maintenance training included Six-month parts and labor contract
Used Equipment with Nikon Support	Installed by Nikon Engineers Performance targets and/or limited guarantees Three-month parts and labor after sales support
Used Equipment "As is" From Nikon	Lower cost used equipment sold in "as is" condition Installed by Nikon engineers Best effort performance targets
Used Equipment from Third Parties	Installed by Nikon engineers Best effort performance targets
Other Support Programs	System inspection and characterization by Nikon prior to third party equipment purchase Complete system de-installation and relocation services Modifications available including wafer/reticle size conversions Remarketing and trade-in capabilities

Table 1. Nikon offers a variety of flexible solutions for fabs to acquire and install lower-priced used Nikon lithography equipment, with minimized risk.

Customers may choose to take advantage of our Certified Used Equipment program where steppers and scanners will be refurbished to original Nikon specifications and installed in your facility by our factory-trained technicians. Customers may also opt to utilize Nikon personnel to characterize and inspect a used system before you decide to purchase it from a third party. Nikon also offers complete system de-installation and relocation services, and frequently performs wafer loader substrate/size conversions, as well as other system upgrades and enhancements to accommodate changes in your fab dynamics. An overview of some of the many NSR upgrades currently offered is accessible via http://www.nikonprecision.com/products/upgrades.html.

Results	Initial Installation Acceptance August-06	Post-Relocation Acceptance June-08
TFD (nm) iso, L/S	37, 38	33, 50
Astigmatism (nm) iso, L/S	21, 20	28, 22
Linewidth Abnormality (Coma)	0.028	0.028
Distortion (nm)	12, 9	11, 7
2 reticle overlay (nm) – Measured at 4 points	8, 12	5, 7
Max power (mW/cm²) and Uniformity (%)	1614, 0.54	1674, 0.50
Stepping Accuracy (nm) X, Y	7, 11	7, 14
Stepping Repeatability (nm) X, Y	5, 5	4, 5

Table 2. Comparison of initial system installation data for early generation KrF scanner, and results following system relocation by Nikon.

With current industry conditions, making use of existing systems and obtaining lower cost used equipment to satisfy capacity demands are both vital to the success of your fab. Nikon is pleased to offer our customers a variety of such solutions to eliminate risks in this highly competitive market. For more information about Nikon used equipment or NSR enhancement programs please contact accountsupport@nikon.com.

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