Tokyo, Japan – February 20, 2014 – Nikon Corporation introduces the NSR-S630D ArF immersion scanner, delivering world-class performance and productivity for 10 nm manufacturing and beyond. The S630D builds on the advanced Streamlign platform to deliver ground-breaking solutions to extend 193 nm immersion lithography. Enhancements to reticle positioning accuracy and air/thermal management provide unprecedented mix-and-match overlay (MMO) ≤ 2.5...