 |
|
Contact training@nikon.com for class schedules and availability.
System Operation
2 day course
The System Operation course is a two-day class that introduces the
NSR controls, software and operating procedures essential for the use
of an NSR system. The student will learn system initialization, system
configuration, software for system operation, reticle loading and aligning,
and first and second level wafer exposure and utility functions. Students
will also be familiarized with commonly used NSR terms and phrases.
|
|
Advanced System Operation
3 day course
The Advanced System Operation course is a three (3) day class
that instructs the students on topics regarding data file creation
and editing. It also covers System Parameters, Adjust Machine and
Alignment Optimization. This course is designed for personnel who
will be required to create and edit files, maintain system parameters
and optimize alignment.
|
|
Service Level 1 & 2
5 day course
The NSR Service Level 1 & Level 2 course is a five (5) day
class that provides instruction and hands on practice for performing regular
or extensive maintenance procedures for the system. This course teaches theory
and procedures for checking, cleaning, lubricating and adjusting system components.
The course is designed for students who have completed the System Operations
training course and have at least one month of on-the-job experience.
|
|
Wafer Loader Type 3
3 day course
The Wafer Loader Type 3 Advanced Service Training course is a
three (3) day class that provides hands-on instruction in electrical
and mechanical adjustment techniques used to service this subsystem.
The student will learn the theory and advanced procedures for checking
and adjusting the component parts of the Wafer Loader Type 3 sub-system.
|
|
Wafer Alignment
4 day course
The Wafer Alignment course is a four (4) day class that instructs
students on theory of operation and how and when to adjust Nikon
wafer alignment systems. This course is designed for persons required
to maintain optimum performance of the NSR. The student will learn
the theory and adjustments for optimizing the wafer alignment subsystem.
|
|
Wafer Stage with Auto Focus
5 day course
The Wafer Stage w/Auto Focus is a five (5) day class that provides
hands-on experience in electrical, mechanical, and optical adjustment
techniques for the Wafer Stage/Auto Focus sub-system. This course
is designed for experienced technicians responsible for maintaining
optimal performance of the NSR in a wafer fabrication environment.
The student will understand the basic theory associated with the
Wafer Stage/Auto Focus sub-system. The student will be capable
of performing the checks and adjustments necessary to maintain
the NSR Wafer Stage w/Auto Focus sub-system.
|
|
Reticle Loader/Alignment Stage
4 day course
This four (4) day class provides hands-on experience in electrical,
mechanical, and optical adjustment techniques for the Reticle Loader,
the Reticle Stage, and the Reticle Alignment sub-systems. This
course is designed for experienced technicians responsible for
maintaining optimal performance of the NSR in a wafer fabrication
environment. The student will understand the basic theory associated
with the Reticle Loader, Reticle Stage, and the Reticle Alignment
systems. The student will be capable of performing the checks and
adjustments necessary to maintain the NSR Reticle Loader, Reticle
Stage, and Reticle Alignment systems.
|
|
Illumination System
5 day course
The Illumination System Advanced Service training course
is a five-day course that provides hands-on practice in electrical
and mechanical adjustment techniques used to service the Illumination
subsystem. This course is designed for experienced technicians
responsible for maintaining optimal performance of the NSR in
a wafer fabrication environment. Students will learn the theory
of operation of specified components of the Illumination system
and hands-on procedures involving checking and adjusting the
Illumination subsystem.
|
NSR-SX10
