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NSR-S202 series classes are offered at
the Worldwide Training Center in Belmont, California upon customer request. Contact training@nikon.com for class schedules and availability. |
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System Operation
2 day course
The System Operation course is a two-day class that introduces
the NSR controls, software and operating procedures essential for
the use of an NSR system. The student will learn system initialization,
system configuration, software for system operation, reticle loading
and aligning, and first and second level wafer exposure and utility
functions. Students will also be familiarized with commonly used
NSR terms and phrases. |
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Advanced System Operation
3 day course
The Advanced System Operation course is a three (3) day class
that instructs the students on topics regarding data file creation
and editing. It also covers System Parameters, Adjust Machine and
Alignment Optimization. This course is designed for personnel,
who will be required to create and edit files, maintain system
parameters and optimize alignment. |
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Service Level 1 & 2
5 day course
The NSR Service Level 1 & Level 2 course is a five (5) day class
that provides instruction and hands on practice for performing regular
or extensive maintenance procedures for the system. This course teaches
theory and procedures for checking, cleaning, lubricating and adjusting
system components. The course is designed for students who have completed
the System Operations training course and have at least one month
of on-the-job experience. |
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Wafer Loader Type 3
3 day course
The Wafer Loader Type 3 Advanced Service Training course is a
three (3) day class that provides hands-on instruction in electrical
and mechanical adjustment techniques used to service this subsystem.
The student will learn the theory and advanced procedures for checking
and adjusting the component parts of the Wafer Loader Type 3 sub-system. |
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Wafer Alignment
4 day course
The Wafer Alignment course is a four day class that instructs
students on theory of operation and how and when to adjust Nikon
off axis wafer alignment systems. This course is designed for persons
required to maintain optimum performance of the NSR. |
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Wafer Stage with Auto Focus
5 day course
The Wafer Stage w/Auto Focus is a five (5) day class that provides
hands-on experience in electrical, mechanical, and optical adjustment
techniques for the Wafer Stage/Auto Focus sub-system. This course
is designed for experienced technicians responsible for maintaining
optimal performance of the NSR in a wafer fabrication environment.
The student will understand the basic theory associated with the
Wafer Stage/Auto Focus sub-system. The student will be capable
of performing the checks and adjustments necessary to maintain
the NSR Wafer Stage w/Auto Focus sub-system. |
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Reticle Loader/Alignment/Stage
4 day course
This four (4) day class provides hands-on experience in electrical,
mechanical, and optical adjustment techniques for the Reticle Loader,
the Reticle Stage, and the Reticle Alignment sub-systems. This
course is designed for experienced technicians responsible for
maintaining optimal performance of the NSR in a wafer fabrication
environment. The student will understand the basic theory associated
with the Reticle Loader, Reticle Stage, and the Reticle Alignment
systems. The student will be capable of performing the checks and
adjustments necessary to maintain the NSR Reticle Loader, Reticle
Stage, and Reticle Alignment systems. |
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Illumination System
5 day course
The Illumination System Advanced Service training course
is a five-day course that provides hands-on practice in electrical
and mechanical adjustment techniques used to service the Illumination
subsystem. This course is designed for experienced technicians
responsible for maintaining optimal performance of the NSR in
a wafer fabrication environment. Students will learn the theory
of operation of specified components of the Illumination system
and hands on procedures involving checking and adjusting the
Illumination subsystem. |
NSR-SX10
