Nikon i-Line systems deliver the superior performance and cost advantage
you expect from the world's lithography leader. Our i-Line solutions provide optimal resolution and overlay with
the lowest cost of ownership (CoO). The Nikon NSR-SF155 scan-field stepper uses the same reduction ratio and
exposure field size as our Deep UV scanners. This eliminates traditional overlay matching issues while
requiring fewer exposures making mix and match with DUV systems easy and cost effective. Nikon also offers
the NSR-2205i14E2 stepper, which uses 5x reduction and a smaller stepper field size to provide optimal CoO
for less critical i-Line layers.
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NSR-SF155
